Our cross-location competencies in Sensor Systems

Sensor Systems

FMD offers profound in-depth knowledge in manufacturing sensors and integration of sensors in complex systems:

  • Design of sensor systems, design for reliability and the test of sensor systems even under harsh environments
  • Fully integrated sensor solutions (MEMS on CMOS) as well as hybrid integrated sensor systems
  • Characterization (optical, acoustical, electrical) and test of sensors and sensor systems – with non-destructive methods as well as reliability assessments under multiple stress scenarios

Flyer Sensor Systems

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Theranostic Implants

Overall system including pressure and acceleration sensor with a length of about 15 mm and a diameter of about 3 mm.

 

High-Voltage Power Grid Monitoring

Monitoring system for high and maximum voltage power grids.

 

Universal Sensor Platform (USeP)

Imaging Sensors

With its 13 member institutes of the Fraunhofer-Gesellschaft and Leibniz Association, the Research Fab Microelectronics Germany (FMD) demonstrates research achievements of international excellence. In this way, FMD contributes to Germany and Europe taking a leading position in research and development. Some selected research highlights and lighthouse projects in the field of imaging sensor technology can be found below.

The list of all publications for the Sensor Systems Technology Platform for download:

3D Magnetic Field Cameras with Worldwide Unique Performance through Profilometer

Schematic representation of a HallinSight® sensor array.
© Fraunhofer IIS
Schematic representation of a HallinSight® sensor array.
  • Development of magnetic measuring systems for the three-dimensional measurement of magnetic vector fields using in-house developed HallinOne® sensors
  • Production of magnetic field cameras (HallinSight®: vector magnetic field measurement) of a quality never seen before. Especially the alignment of the z-sensors serving as reference can be checked with this mechanical measurement and thus further optimized in several steps. In the end, this leads to vectorial measuring cameras whose alignment of the individual magnetic field sensors is very precise.
  • FMD-Investment "Laboratory for Nanooptical Structures" enables the alignment and positioning of many single chips on a PCB carrier; meaning, the precise measurement as well as correction and verification of the magnetic field values of the measuring system.

Cooperation: 

Projects with automotive suppliers

Further information: 

HallinSight®: Vectorial magnetic field measurement

High-Resolution Imaging Using SAR and ISAR Techniques

300 GHz MIRANDA - highest resolution of 3.5 mm worldwide. SAR image taken at 300-GHz from a moving car. The image shows a parking bay.
© Fraunhofer FHR
300 GHz MIRANDA - highest resolution of 3.5 mm worldwide. SAR image taken at 300-GHz from a moving car. The image shows a parking bay.
  • The world's first SAR images at 300 GHz
  • With motion compensation on flying and moving platforms at wavelengths down to the submillimeter wave
  • GMTI, change detection and 3D scene acquisition by interferometry
  • Radar signal generator and method for radar signal generation patented (Patent: DE102010044134A1)

Publication:

Palm, S. et al. (2018): Mobile Radar Mapping—Subcentimeter SAR Imaging of Roads, IEEE Transactions on Geoscience and Remote Sensing, vol. 56, no. 11, pp. 6734-6746, Nov. 2018. DOI: 10.1109/TGRS.2018.2842643

Further information: 

300-GHz SAR measurements of streets and facades

Photodetectors for Highly Dynamic Three-Dimensional Imaging - Even in Changing Weather Conditions

CSPAD detector: These photodetectors combine highly dynamic three-dimensional imaging with reliable algorithms for high-performance use even in changing weather conditions.
© Fraunhofer IMS
CSPAD detector: These photodetectors combine highly dynamic three-dimensional imaging with reliable algorithms for high-performance use even in changing weather conditions.

Modern driver assistance systems require efficient and reliable sensor technology. Autonomous vehicles must be able to detect their surroundings with absolute certainty. For this purpose, CSPAD detectors combine highly sensitive three-dimensional imaging with reliable algorithms for high-performance operation even under changing weather conditions, e.g. for use in LiDAR applications.

  • Maximum ranges even with high sunlight intensity and low system costs at the same time
  • Integration of the SPAD detectors in a 0.35 µm CMOS process certified for the automotive industry and optimized for optoelectronic applications
  • In-pixel integrated adaptive photon coincidence circuit for background light suppression

Cooperations:

Publication: 

Ruskowski, J. et al. (2020): 64x48 pixel backside illuminated SPAD detector array for LiDAR applications;  SPIE Photonics West 2020, SPIE Opto; USA. DOI: 10.1117/12.2550634

Further information: 

Technologies in the Business Unit CMOS Image Sensors